Smaller-Faster-Cheaper-Better
in High Output Semiconductor Manufacturing
WHITE DEER, PA - November 1, 2006 - It’s no secret
that the sky-rocketing development of technology causes people
to want, need and expect instantaneous results. Every industry
has to adjust to the challenging demands to provide products
that are smaller, faster, cheaper and better. Today, it is
a requirement to gain customer confidence and produce a profit.
The new TPS VICTOR™ Vertical Inline Oven
for High Output (UPH) semiconductor production. This new oven
provides clear advantages over traditional horizontal or batch
ovens.
The movement in the semiconductor manufacturing industry
is for more units per hour (UPH). At the same time OEMs, integrators
and marketers are demanding constant improvement in quality,
miniaturization, delivery and price. The continuing, and ever-increasing,
challenge for the semiconductor industry is keeping up with
the ability to manufacture new products and to satisfy the
demands of customers.
Semiconductor engineers constantly need to update what new
devices will be in production and what kind of parts, belonging
to those devices, will need to be tested in order to maintain
strict levels of quality. The tight tolerances in this industry
make this task even more challenging.
In a world where products seem to become obsolete within
weeks of their release, engineers have to stay one step—or
more—ahead of the game. Estimating the total cost of
ownership including initial product price, upkeep and manpower
isn’t easy when the world’s constantly advancing.
The key for every product developer is to come up with a product
that has industry standard parts, is easy to maintain and
operate, and is able to produce a higher output with low cost.
Thermal Product Solutions (TPS) is innovating in the semiconductor
manufacturing market with new vertical inline ovens. The VICTOR ovens improve on the traditional horizontal and batch
ovens used in previous manufacturing systems.
Here’s how this semiconductor oven is smaller, faster,
cheaper and better than horizontal batch ovens:
Smaller
The vertical design allows for more usable space in a facility,
or the oven can fit in a smaller facility. Since it requires
less space, there is less manufacturing space to heat, cool
and maintain. Proper maintenance is also achieved because
the modular composite exterior oven panels allow for quicker
access.
Faster
Time to market can be the difference between success and failure
in this industry. The VICTOR inline oven is faster because
it is continuously running to allow a 2,000 to 3,000 UPH output.
There is no more “load…run cycle…cool down…unload”
process like batch ovens require. With an inert gas purge
at each of the seven heating zones plus an independent cooling
zone, this offers more control over the entire process.
Cheaper
Because the technology that powers consumer and industrial
products continually changes, manufacturing methods must also
change. The VICTOR is able to solve this problem because
it fits into your current work flow and is designed for future
technologies. This oven uses industry standard product carriers
and is designed to produce parts using next generation materials
that can converge with traditional semiconductor and PCB technology.
Modern touch-screen controls minimize the costs associated
with training, job setup and programming. Web-based support
is also offered, which enables the manufacturer’s service
technicians to keep ovens running remotely. The forward looking
design allows the VICTOR oven to be part of your work flow,
far into the future even as your manufacturing requirements
change.
Better Products
There are several reasons why vertical inline ovens produce
better products than existing batch ovens. The most immediate
advantage for every manufacturing facility is the automated
load/unload mechanism that uses pick and place robotic and
dual lane unloading to eliminate the need for human intervention
and risk of damaging products during the process. Other reasons
include the walking beam lifting mechanisms that move units
through the process with less chance of damaging high-value
components. The VICTOR also can produce parts using flexible,
lead-free materials that are environmentally safe and fire
resistant.
The TPS VICTOR Vertical Inline Oven
The VICTOR was designed with a .5-inch pitch to accommodate
most industry standard product carriers. This pitch height
allows for maximum utilization of the interior oven space.
Rugged toothed walking beams are machined to the tightest
industry tolerances.
These beams move the product carriers through the first four
oven zones. At zone four a transfer sled mechanism transports
the product carrier to zone five where the walking beams lower
the product carriers down through the remaining zones.
The unloader and loader units use a pick and place method.
The product will enter the loading unit via a SMEMA conveyor
where a proximity sensor confirms the tray’s correct
alignment position. The “gripper” assembly loads
the new product carriers into the tray that sits on a “z”
platform. Proximity sensors alert the PLC that the tray is
ready to unload. The same process holds true for the unloader.
The gripper assembly removes the tray from the product carriers
and places them on the exit SMEMA belt. The product is then
released to the downstream equipment when the appropriate
SMEMA handshake is completed. Future upgrades for the TPS
unit include a dual lane unloader that will help speed up
the unload process.
The heating modules are comprised of 3 kW and 6 kW forced
air heating capacity. All modules can be removed easily for
replacement or repair. The zones are independently controlled
via thermocouples by the PLC.
The cooling zone is a water coil with forced air. The water
is controlled by a solenoid valve and can facilitate tower
or chilled water. All modules have the capacity of inert gas
purge. Flow meters are installed on the oven for precise flow
control.
The VICTOR will incorporate the S7-300 Siemens PLC. This
PLC utilizes a 12-inch color operator interface panel (O.I.P.)
mounted on an ergonomic flex arm thus eliminating the standard
PLC configuration and reliance on Windows® based operating
systems. This power PLC allows for individual customer flexibility
for process programming. TPS will tailor screen layouts specifically
for each customer’s application. With Ethernet communication
capabilities, it offers an affordable solution to SECS GEM
implementation.
An addition to the Siemens S7-300 PLC package is a maintenance
pendant. This tool is a handheld color interface device that
allows a user or technician to energize specific components
on the oven for troubleshooting or alignment inspection. This
interface device uses profibus communication to interface
with the PLC. As is the case for the O.I.P. above, this item
allows TPS to tailor individual customer screens to satisfy
any need.
The VICTOR’s design incorporates molded composite
panels. This gives the oven smooth rounded lines and a modern,
clean look that will enhance any production facility. The
covers attach to the oven frame with quick fasteners that
allow the panels to be removed easily for maintenance or troubleshooting.
TPS
TPS is a global leader in thermal products, offering cost-effective
engineered solutions. This leadership position was earned
by providing innovative, high-quality, cost-effective and
environmentally responsible products. TPS’s engineering
expertise and technical knowledge offers customers a quality
product that is adaptable to the changing technology. Core
product lines are Industrial Ovens, Pharmaceutical Equipment,
Environmental Test Products, Heat Treat Industrial Furnaces,
Non-Ferrous Melting Equipment, Launder Systems, Crystal Growing,
In-line Curing Ovens, Continuous Process Curing Ovens and
Conveyor Ovens.
More information about TPS is available on its website at
www.thermalproductsolutions.com
SPX Corporation is a global provider of technical products
and systems, industrial products and services, flow technology,
cooling technologies and services, and service solutions.
The Internet address for SPX Corporation's home page is www.spx.com.
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