Kayex KX150 Silicon Crystal Growing Furnace
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KX150 8 inch ingot silicon crystal growing furnace
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KX150 8 inch ingot silicon crystal growing furnace
Larger image
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The Kayex KX150 Silicon Crystal Growing furnace is capable of growing
silicon ingots up to 8 inches in diameter.
Performance
| Typical Ingot Diameter |
8" (200 mm) |
| Pull Chamber Door Opening (W x H) |
15” x 82 ” (3881 x 2083 mm) |
| Throat Diameter |
14” (356 mm) |
| Seed Lift Rate |
0-20 in/hr (0-508 mm/hr) |
| Seed Jog Speed (Nominal) |
20 in/min (508 mm/min) |
| Total Crucible Travel |
18" (457 mm) |
| Crucible Lift Rate |
0-10 in/hr (0-254 mm/hr) |
| Crucible Jog Speed (Nominal) |
2.0 in/min (50.8 mm/min) |
| Seed Rotation (Reversible) |
0-50 rpm |
| Crucible Rotation (Reversible) |
0-20 rpm (std option) |
| Vacuum Pumps- Main |
221 cfm (6,260 l/min)
(Recommended) Aux 60 cfm (1700 l/min) |
Silicon
Charge Capacity
Standard Hot Zones for the KX260 are available
to fit the following
crucible sizes:
Crucible
Diameter |
Crucible
Height |
Charge
Size Cold Pack |
| 20.0 in |
15.0 in |
90 kg |
| 22.0 in |
15.0 in |
118 kg |
| 24.0 in |
15.0 in |
150 kg |
Utility Requirements
| Electrical
Furnace: |
350kVA, 380 / 400 / 440 / 460 ±10% VAC
3 PHASE
50/60 Hz, FUSED FOR 650 / 625 / 575 / 550 amps FOR 650 / 625 / 575 / 550 amps |
| Coolant
Water |
| Maximum
Inlet Temperature |
77° F (25°C) |
| Minimum
Flow Rate |
78 gpm (295 l/min) total |
| Diff.
Supply Pressure |
30 psi (2.1 kg/cm2) |
| Argon |
| Mass
Flow Control (Max.) |
200 slpm |
| Purge
Flow |
100 slpm |
| Facility
Total |
300 slpm |
| Recommended
Supply Pressure |
75 psi (5.3 kg/cm2) |
| Air |
| Recommended
Supply Pressure |
90 psi (6.3 kg/cm2) |
Dimensions
|
Furnace
Overall |
Control Console |
Power
Supply |
Main Pump (KT-500) |
Auxiliary Pump (KTC-60) |
| Height |
259 in.
(6.59 m) |
63 in.
(1.60 m) |
53 in.
(1.35 m) |
60 in.
(1.52 m) |
41.75 in.
(1.06 m) |
| Width |
151 in.
(3.82 m) |
26 in
(0.66 m) |
53 in.
(1.35 m) |
48 in.
(1.22 m) |
31 in.
(0.79 m) |
| Depth |
132 in.
(3.36 m) |
36 in
(0.91 m) |
48 in.
(1.22 m) |
48 in.
(1.22 m) |
32.38 in.
(0.82 m) |
| Weight |
22,000 lbs
(10,000 kg) |
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KX150 Footprint
KX150 Side View
KX150 Console/Power Supply
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